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Vacuum Pump Equipment Dry Vacuum Pump

Oil-Free Type Product List

ISP Series

ISP Series

The ISP series are used in various vacuum environments, ranging from the accelerator market to the general-purpose vacuum device market.

DVSL Series

DVSL Series

The DVSL series are tough scroll vacuum pumps that are resistant to continuous operation near atmospheric pressure, repeated operation between atmospheric pressure and vacuum, and water vapor exhaust.

GVS Series

GVS Series

The GVS series make scroll vacuum pumps more familiar. They can be used in low-vacuum regions.

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