Vacuum Pump Equipment Dry Vacuum Pump
Oil-Free Type Product List
ISP Series
The ISP series are used in various vacuum environments, ranging from the accelerator market to the general-purpose vacuum device market.
DVSL Series
The DVSL series are tough scroll vacuum pumps that are resistant to continuous operation near atmospheric pressure, repeated operation between atmospheric pressure and vacuum, and water vapor exhaust.
GVS Series
The GVS series make scroll vacuum pumps more familiar. They can be used in low-vacuum regions.